![]() ![]() showed that 22.8% of the energy consumption was reduced under outdoor air design conditions in winter by replacing steam humidification with water humidification. identified the energy-saving effect from the fan re-arrangement (push-through or draft-through) and temperature gap between supplied chilled water and returned chilled water flowing inside the cooling coil in two cases. verified the amount of energy saved by modifying the temperature and humidity conditions of the TFT-LCD fabrication plant (FAB). ![]() Previous studies on air-conditioning systems of semiconductor cleanrooms have been conducted to enhance the energy-saving effect of the air-conditioning system of cleanrooms. Considering that the annual power consumption of Samsung Electronics' device solution sector was 19,546 GWh in 2020 (which was equivalent to 3.5% of Korea's total power consumption of 567 TWh), the amount of electricity used in clean rooms is significant, proving energy-saving of the air-conditioning system of cleanroom is critical. To generate a cleanroom environment, an air-conditioner facility uses 21–29% of the total power used for semiconductor fabrication. ![]() From the architectural perspective, studies have shown that semiconductor industries using cleanrooms can consume 30–50 times more energy than commercial buildings and up to 100 times more energy than typical office buildings. Semiconductor fabrication is an industry that uses large amounts of energy to control temperature, humidity and particle in cleanroom operation. Consequently, the head and static pressure designs of the fluid transfer equipment (i.e., pumps and fans) of the cold energy recovery system should be considered with caution when the cold energy recovery system is applied. However, with the consideration of the power consumed by the cold energy recovery system (i.e., water/air-side free cooling system), actual energy-saving rate was low. The result showed that the cooling load of the outdoor air-conditioner decreased by 10.2–13.1% and 8.5–11.2% when the water-side free cooling system and air-side free cooling system, respectively, were applied at an exhaust gas temperature of 24–28 ☌ and a humidity ratio of 0.00733 kg/kg’. When applied to the conventional outdoor air-conditioner after cold energy recovery in both systems, the energy-saving effect was estimated by a simulation program (i.e., engineer equation solver) using a theoretical calculation model. Two systems have been proposed: a water-side free cooling system that recovers cold energy by connecting a cooling tower to exhaust gas, and an air-side free cooling system that recovers cold energy by connecting a membrane energy heat exchanger. Therefore, with the perspective of introducing cold energy recovery system into outdoor air-conditioner, this paper suggests the analysis of the energy-saving effect of the recovery system which recovers wasted cold energy of the exhaust gas from the semiconductor fabrication plant located in high-temperature and humid region. However, it is highly difficult to obtain the energy required for cooling without operating a chiller unless there is a climatic advantage. The energy required for constant temperature and humidity has been developed and applied in various ways, e.g., waste heat recovery technology without a boiler. Of the total energy, semiconductor manufacturing facilities consume the most electricity, where 21–29% of the total energy is used to maintain a clean room environment at a constant temperature and humidity. The semiconductor industry requires large amounts of energy. ![]()
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